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Study of the Oxidation of Polycrystalline SiGe: Formation of Ge Nanocrystals and their Related Luminescence

Published online by Cambridge University Press:  01 February 2011

A. C. Prieto ,
M. Avella ,
J. Jiménez ,
A. Rodríguez ,
J. Sangrador ,
T. Rodríguez  and
A. Kling
A. C. Prieto
Affiliation:
Dpto. Física de la Materia Condensada, E.T.S.I.I., U. de Valladolid, Valladolid, Spain.
M. Avella
Affiliation:
Dpto. Física de la Materia Condensada, E.T.S.I.I., U. de Valladolid, Valladolid, Spain.
J. Jiménez
Affiliation:
Dpto. Física de la Materia Condensada, E.T.S.I.I., U. de Valladolid, Valladolid, Spain.
A. Rodríguez
Affiliation:
Dpto. Tecnología Electrónica, E.T.S.I.T., Universidad Politécnica de Madrid, Madrid, Spain.
J. Sangrador
Affiliation:
Dpto. Tecnología Electrónica, E.T.S.I.T., Universidad Politécnica de Madrid, Madrid, Spain.
T. Rodríguez
Affiliation:
Dpto. Tecnología Electrónica, E.T.S.I.T., Universidad Politécnica de Madrid, Madrid, Spain.
A. Kling
Affiliation:
Instituto Tecnológico e Nuclear, Sacavém, and Centro de Física Nuclear da Universidade de Lisboa, Lisbon, Portugal.
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Abstract

Polycrystalline SiGe layers have been oxidized in either dry or wet atmospheres. The evolution of the growing oxides and the SiGe layer during the oxidation processes have been characterized using Raman spectroscopy, X-ray diffraction, Rutherford backscattering and Fourier transform infrared spectroscopy. Formation of Ge nanocrystals has been observed for both oxidation atmospheres. Violet luminescence emission has been observed and its relation to the oxidation processes has been studied. The luminescence is unambiguously related to the presence of these Ge nanocrystals. Since it does not exhibit quantum confinement, it must be related to defects linked to the nanocrystals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A8.3
Copyright
Copyright © Materials Research Society 2005

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