Hostname: page-component-cd9895bd7-8ctnn Total loading time: 0 Render date: 2024-12-27T01:57:08.667Z Has data issue: false hasContentIssue false
  • English
  • Français

Study of the Effects of Si Addition on the Properties of Hard Nanocomposite Thin Films

Published online by Cambridge University Press:  26 July 2012

Jose Luis Endrino ,
Sergio Palacin ,
Alejandro Gutierrez ,
Myriam Aguirre  and
Franz Schäfers
Jose Luis Endrino
Affiliation:
[email protected], Lawrence Berkeley National Laboratory, AFRD, 1 Cyclotron Rd. Building 53, Berkeley, CA, 94720, United States
Sergio Palacin
Affiliation:
[email protected], Universidad Autonoma de Madrid, Madrid, N/A, Spain
Alejandro Gutierrez
Affiliation:
[email protected], Universidad Autonoma de Madrid, Madrid, N/A, Spain
Myriam Aguirre
Affiliation:
[email protected], Empa-Swiss Federal Lab for Materials Testing and Research, Duebendorf, N/A, Switzerland
Franz Schäfers
Affiliation:
[email protected], BESSY GmbH, Berlin, N/A, Germany
Get access

Abstract

In the present study, hard TiSiN coating compounds with different Si content have been deposited by the magnetron sputtering technique. X-ray diffraction (XRD) and X-ray absorption spectroscopy (XAS) have been employed to investigate the effects of Si addition on the composition, structure and phase development of the cubic NaCl-type structure. To get some insight on these changes, X-ray absorption spectra have been measured at the Ti and Si K-edges in fluorescence yield mode. The collected data showed that the interaction between Ti and Si was weak and the formation of a-Si3N4 can be assumed. Hardness measurements were also consistent with the formation of hard nanocomposite films. A maximum hardness of about 36 GPa was obtained for the sample with 11 at. % Si.

Keywords

sputteringnitridenanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 976: Symposium EE – Size Effects in the Deformation of Materials – Experiments and Modeling , 2006 , 0976-EE03-18
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Beake, B.D. et. al., J. Phys. D: Appl. Phys 39, 1392–1397 (2006).Google Scholar
2. Shen, Y.G. et. al., J. Mater. Res., 19 (2), 523–534 (2004).Google Scholar
3. Vaz, F. et al. , Surf. Coat. and Technol. 146–147, 274–279 (2001).Google Scholar
4. Endrino, J.L. et. al., J. Mater. Res., 7 3163, (2002).Google Scholar
5. Verprek, S., Thin Solid Films, 317 449–454, (1998).Google Scholar
6. Zhang, X.D. et. al., Surf. Coat. and Technol. 177–178, 325–333 (2004).Google Scholar