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The Study of Contamination of Carbon, Boron, and Oxygen in LEC-GaAs
Published online by Cambridge University Press: 25 February 2011
Abstract
Carbon in LEC GaAs was found to be introduced as CO from the ambient atmosphere; the oxygen concentration in the crystals decreased with increase in the duration of melting. An equilibrium segregation coefficient of oxygen in GaAs crystals was found by charged particle activation analysis to be 0.1, the value of which was smaller by a factor of 3~4 than that reported before.
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- Copyright © Materials Research Society 1990
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