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Studies of Interface and Surface Structures of BaTiO3 Thin Films Grown on SrTiO3 (001) Substrates by Mbe

Published online by Cambridge University Press:  15 February 2011

Hisashi Shigetani ,
Kazuyoshi Kobayashi ,
Masayuki Fujimoto ,
Wataru Sugimura ,
Yoshio Matsui  and
Junzo Tanaka
Hisashi Shigetani
Affiliation:
Taiyo Yuden Co LTD, Kamisatomi 1660, Harunamachi, Gunma-gun, Gunma, 370-33 JAPAN, [email protected]
Kazuyoshi Kobayashi
Affiliation:
Taiyo Yuden Co LTD, Kamisatomi 1660, Harunamachi, Gunma-gun, Gunma, 370-33 JAPAN, [email protected]
Masayuki Fujimoto
Affiliation:
Taiyo Yuden Co LTD, Kamisatomi 1660, Harunamachi, Gunma-gun, Gunma, 370-33 JAPAN, [email protected]
Wataru Sugimura
Affiliation:
Waseda University, Ohkubo 3-4-1, Shinjuku, Tokyo, 169 JAPAN
Yoshio Matsui
Affiliation:
National Institute for Research in Inorganic Materials, Namiki 1-1, Tsukuba, Ibaraki, 305 JAPAN
Junzo Tanaka
Affiliation:
National Institute for Research in Inorganic Materials, Namiki 1-1, Tsukuba, Ibaraki, 305 JAPAN
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Abstract

We studied a lattice distortion and relaxation of BaTiO3(BT) thin films grown on SrTiO3 (001) substrates(ST) by a molecular beam epitaxy method using an oxygen radical source RT were prepared by alternately deposition of BaO and TiO2 layers, and the structure of the thin films was evaluated by X-ray diffraction, reflection high energy electron diffraction, transmission electron microscopy, atomic force microscopy, coaxial impact collision ion scattering spectroscopy and X-ray photoelectron spectroscopy The lattice constants of the films varied with distance from the interface of BT and ST It was found that lattice distortion and relaxation of BT On the other hand, the surface analysis indicated that adsorbed oxygen was enriched on the BaO-terminated surface in comparison with the TiO2-terminated surface Then we proposed new mechanism of BT thin film growth with adsorbed oxygen.

Keywords

BaTiO3SrTiO3molecular beam epitaxythin filmoxygen radical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 440: Symposia CA – Structure and Evolution of Surfaces , 1996 , 293
Copyright
Copyright © Materials Research Society 1997

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References

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