Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-25T15:16:05.523Z Has data issue: false hasContentIssue false
  • English
  • Français

Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison

Published online by Cambridge University Press:  26 February 2011

S. E. Ready ,
J. B. Boyce  and
C. C. Tsai
S. E. Ready
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
J. B. Boyce
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
C. C. Tsai
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
Get access

Abstract

Hydrogen NMR data on three microcrystalline silicon samples grown by plasma decomposition using different H2/SiH4 gas ratios are examined. A decrease of the total atomic percent hydrogen content from 12 at.% to 6 at.% is seen as the gas ratio is reduced from 98/1 to 20/1. 20 to 40% of this total hydrogen content is determined to be non-bonded molecular hydrogen. In addition, evidence for SiH2 units is seen in the spectrum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 118: Symposium E – Amorphous Silicon Technology , 1988 , 103
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Kumeda, M., Yonezawa, Y., Morimoto, A., Ueda, S. and Shimizu, T., J. Non. Cryst. Solids 59, 775 (1983).CrossRefGoogle Scholar
2 Hayashi, S., Yamasaki, S., Matsuda, A. and Tanaka, K., J. Non. Cryst. Solids 59, 779 (1983)Google Scholar
3 Reimer, J. A., Vaughn, R. W., and Knights, J. C., Phys. Rev. B, 24, 3360 (1981)CrossRefGoogle Scholar
4 Boyce, J. B. and Stutzmann, M., Phys. Rev. Lett. 54, 562 (1985).Google Scholar
5 Conradi, M. S. and Norberg, R. E., Phys. Rev. B, 24, 2285 (1981)CrossRefGoogle Scholar
6 Carlos, W. E. and Taylor, P.C, Phys. Rev. B, 25, 1435 (1982)Google Scholar
7 Leoplod, D. J., Boyce, J. B., Fedders, P. A., and Norberg, R. E., Phys. Rev. B, 26, 6053 (1982)Google Scholar
8 Boyce, J. B., Stutzmann, M., and Ready, S. E., J. Non. Cryst. Solids, 77,265 (1985)CrossRefGoogle Scholar
9 Boyce, J. B. in Hydrogen in Disordered and Amorphous Silicon edited by Bambakidis, G. and Bowman, C. (NATO Advanced Study Inst. Proc. Rhodes, Greece 1985) pp. 101–109.Google Scholar