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Structure of Highly Perfect Semiconductor Strained-Layer Superlattices: High-Resolution X-Ray Diffraction and Computer Simulation Studies

Published online by Cambridge University Press:  28 February 2011

J. M. Vandenberg
J. M. Vandenberg*
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
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Abstract

High-resolution x-ray diffraction (HRXRD) measurements of strained-layer superlattices (SLS's) have been carried out using a four-crystal monochromator. A wide asymmetric range of sharp higher-order x-ray satellite peaks is observed indicating well-defined periodic structures. Using a kinematical diffraction step model very good agreement between measured and simulated x-ray satellite patterns could be achieved. These results show that this x-ray method is a powerful tool to evaluate the crystal quality of SLS's.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 145: Symposium A – III-V Heterostructures for Electronic/Photonic Devices , 1989 , 455
Copyright
Copyright © Materials Research Society 1989

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