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Structure Determination of the Si(111)-CaF2 Interface

Published online by Cambridge University Press:  21 February 2011

R. M. Tromp
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA
W. Krakow
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA
F.K. LeGoues
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA
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Abstract

The structure of the Si(111)-CaF2 interface has been determined with Medium Energy Ion Scattering and High Resolution Transmission Electron Microscopy. Methods to determine this interface structure with HRTEM are discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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