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Structure and Properties of W and Mo-Subcontact Layers Influenced by Thermal Annealing

Published online by Cambridge University Press:  15 February 2011

K. A. Gesheva ,
G. Stoyanov ,
A. Harizanova  and
R. Stefanov
K. A. Gesheva
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
G. Stoyanov
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
A. Harizanova
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
R. Stefanov
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
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Abstract

One of the most important problems to solve in order to improve the CdTe solar cell performance is the deposition of stable ohmic contacts. W and Mo with their high work function, high temperature stability and good mechanical properties are prospective materials for contacts to p-CdTe. This paper presents data for the electrophysical characteristics of W or Mo/CdTe and W or Mo/ CdS-CdTe heterostructure systems. W and Mo films are deposited by a W(CO)6 based CVD process at atmospheric pressure and low temperatures (250–300)°C. We emphasize the improvment of the contact properties by developing a transitional layer heavily doped with acceptors. The defects arrangement in the layer should promote the diffusion of such impurities as Cu, P, As etc. A proper balance between the impurities and the defects could be achieved by suitable thermal treatment. Rapid thermal or traditional annealing in different gas atmospheres – N2, Ar or air were applied, followed by chemical or electrochemical treatment. Electrical characteristics measurements and structural studies were performed for CdTe layers as well as for the SnO2 - CdS - CdTe structures

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 477
Copyright
Copyright © Materials Research Society 1996

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References

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