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Structure and Optical Properties of Si/InAs/Si Layers Grown by MBE on Si Substrate at Different Temperatures
Published online by Cambridge University Press: 10 February 2011
Abstract
Epitaxial Si/InAs/Si heterostructure grown on (001) Si substrate by molecular beam epitaxy (MBE) and annealed at 800°C, and 880°C were investigated by High Resolution Transmission Electron Microscopy (HRTEM). Extensive interdiffusion at 800°C leads to the formation of an InAs solid solution as well as InAs-enriched regions with extensions of ∼6nm, which exhibit two kinds of ordering. The ordering of InAs molecules occurred, respectively, in {110} planes inclined and parallel to the [001] growth direction. It is attributed to the energy gain from the reduced number of mixed Si-As and Si-In bonds. The sample grown at 800°C shows photoluminescence in the 1.3.µm region, which is tentatively attributed to the recombination of excitons localised in the ordered regions
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- Copyright © Materials Research Society 2000
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