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Structural and vibrational properties of silicon dioxide thin films densified by medium-energy particles bombardment

Published online by Cambridge University Press:  21 March 2011

Alexis Lefèvre ,
Laurent J. Lewis ,
Ludvik Martinu  and
Michael R. Wertheimer
Alexis Lefèvre
Affiliation:
Département de Physique et Groupe des Couches Minces (GCM), Université de Montréal, Case Postale 6128, Succursale Centre-Ville, Montréal Québec H3C 3J7, Canada; e-mail: [email protected]
Laurent J. Lewis
Affiliation:
Département de Physique et Groupe des Couches Minces (GCM), Université de Montréal, Case Postale 6128, Succursale Centre-Ville, Montréal Québec H3C 3J7, Canada; e-mail: [email protected]
Ludvik Martinu
Affiliation:
Département de Génie Physique et de Génie des Matériaux et Groupe des Couches Minces (GCM), École Polytechnique de Montréal, Case Postale 6079, Succursale Centre-Ville, Montréal, Québec H3C 3A7, Canada
Michael R. Wertheimer
Affiliation:
Département de Génie Physique et de Génie des Matériaux et Groupe des Couches Minces (GCM), École Polytechnique de Montréal, Case Postale 6079, Succursale Centre-Ville, Montréal, Québec H3C 3A7, Canada
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Abstract

Using classical molecular-dynamics simulations, we worked out a simple model of Ion Beam Assisted Deposition (IBAD) of silicon dioxide on an amorphous silica substrate, in view to in- vestigate the modifications of the structural and vibrational properties induced by medium-energy bombardment. Atoms are assumed to interact via the two- and three-body potential developed by Nakano et al.[1]. Analysis of the films grown with increasing ratio, R, of medium-(30 eV) to low- (1 eV) kinetic energy SiO2 particles shows that the density rises rapidly, from 1.3 g/cm3 for R =0 to about 2.3 g/cm3 for R = 0.7. This effect can be associated primarily with structural changes occurring at an intermediate length scale (4-10 Å), as it manifests itself by changes in the so-called first sharp diffraction peak (FSDP), the finger-print of medium range order (MRO) in a-SiO2 glass [2, 3]. We found also that the densification results in a significant decrease of the number of “soft” vibrational modes, occurring in the 0.5-3.5 THz frequency range.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 677: Symposium AA – Advances in Materials Theory and Modeling–Bridging Over Multiple-Length and Time Scales , 2001 , AA4.21
Copyright
Copyright © Materials Research Society 2001

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References

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