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Static and Dynamic Characterization of Buckled Composite SiO2-Au Microbridges

Published online by Cambridge University Press:  10 February 2011

L. Nicu ,
C. Bergaud ,
A. Martinez  and
P. Temple-Boyer
L. Nicu
Affiliation:
LAAS-CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex 4, France
C. Bergaud
Affiliation:
LAAS-CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex 4, France
A. Martinez
Affiliation:
LAAS-CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex 4, France
P. Temple-Boyer
Affiliation:
LAAS-CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex 4, France
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Abstract

Theoretical and experimental investigations have been made to study the nonlinear static and dynamic behavior of composite Si02-Au microbridges. Measurements of maximal deflection amplitude were carried out on arrays of clamped-clamped SiO2-Au beams buckling under the effect of thin film effective residual stress. The static analysis adresses the issue of microfabricated beam buckling from an energy point of view. SiO2-Au and Au effective residual stresses are evaluated by considering the measured buckling maximal deflection and by through an adequate approximation of the shape of the microbeam deflection curve. The dynamic approach is based on a direct analytical model yielding an exact solution to the linear problem associated with the nonlinear vibrations of initially buckled clamped-clamped structures. Several experimental multi-mode dynamic responses of composite buckled beams are also given to illustrate the validity and accuracy of this analytical model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 223
Copyright
Copyright © Materials Research Society 2000

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References

[1] Mehregany, M, Howe, R T and Senturia, S. D., J. Appl. Phys. 62, 3579 (1987)Google Scholar
[2] Fang, W and Wickert, J A, J. Micromech. Microeng. 4, 116 (1994)Google Scholar
[3] Fang, W and Wickert, J A, J. Micromech. Microeng. 5, 276 (1995)Google Scholar
[4] Nicu, L, Temple-Boyer, P, Bergaud, C, Scheid, E and Martinez, A, J. Micromech. Miroeng. 9, 414(1999)Google Scholar
[5] Brashyam, G R and Prathap, G, J. Sound Vibr. 72, 191 (1980)Google Scholar
[6] Kim, C S and Dickinson, S M, J. Sound Vibr. 104, 170 (1986)Google Scholar
[7] Geijselaers, H J M and Tijdeman, H, Sensors and Actuators A 29, 37 (1991)10.1016/0924-4247(91)80029-OGoogle Scholar
[8] Nayfeh, A H, Kreider, W and Anderson, T J, AIAA J. 33, 1121 (1995)Google Scholar
[9] Bouwstra, A and Legtenberg, R, Sensors Materials 5 1, 1 (1993)Google Scholar
[10] Timoshenko, S P and Young, D H, Vibration Problem in Engieri (Van Nostrand Reinhold Company), 1972 Google Scholar
[11] Petersen, K E, IEEE Trans. Electron Devices ED-25 10, 1241 (1978)10.1109/T-ED.1978.19259Google Scholar
[12] MATLAB Software wrsion 5.2.0 (The MathWorks, Inc.), 1998 Google Scholar
[13] Kinbara, A and Haraki, H, Jpn. J. Appl. Phys. 4, 423 (1965)Google Scholar
[14] Nicu, L and Bergaud, C, J. Appl. Phys. 86, 5835 (1999)10.1063/1.371600Google Scholar