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Stability of Nitrogen in Sputtered Iron Nitride thin films and Multilayers
Published online by Cambridge University Press: 15 February 2011
Abstract
Different phases of FeN thin films and Fe/FeN multilayers were prepared by reactive rf sputtering. The release of nitrogen and the crystallographic transformations during annealing were monitored by thermal desorption spectrometry and X-ray diffraction experiments. Finally, the diffusivity of nitrogen in the γ-Fe4N phase was evaluated.
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- Copyright © Materials Research Society 1997