Hostname: page-component-cd9895bd7-mkpzs Total loading time: 0 Render date: 2024-12-27T02:37:37.905Z Has data issue: false hasContentIssue false
  • English
  • Français

Sputter Roughening Instability on the Ge(001) Surface: Energy and Flux Dependence

Published online by Cambridge University Press:  21 February 2011

E. Chason ,
T.M. Mayer  and
B.K. Kellerman
E. Chason
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
T.M. Mayer
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
B.K. Kellerman
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Get access

Abstract

We have measured surface roughening kinetics during low energy Xe ion sputtering of Ge (001) surfaces. The results are interpreted in terms of an instability theory developed by Bradley and Harper [1]. Although the calculated magnitude of the roughening rate does not agree with the measured value, the variation of the rate with ion flux and energy is in agreement with the theory.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 143
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 M Bradley, R., M. E. Harper, J., J. Vac. Sci. Technol. A 6, 2390 (1988).Google Scholar
2 C. Carter, G., Navinsek, B., Whitton, J. L., in Sputtering by Ion Bombardment II, Behrisch, R., ed. (Springer, Berlin, 1983).Google Scholar
3 Mayer, T.M., Chason, E. and Howard, A.J, J. Appl. Phys. 76, 1633 (1994).Google Scholar
4 Chason, E., Mayer, T.M., Kellerman, B.K., Mcllroy, D.N. and Howard, A.J., Phys. Rev. Lett. 72, 3040 (1994).Google Scholar
5 Sigmund, P., Phys. Rev. 184, 383 (1970); J. Mater. Sci. 8, 1545 (1973).Google Scholar
6 Mullins, W. W., J. Appl. Phys. 30, 77 (1959).Google Scholar
7 Herring, C. in Physics of Powder Metallurgy, Kingston, W. E., ed. (McGraw-Hill, New York, 1951).Google Scholar
8 H.Cirlin, E., J. Vajo, J., E. Doty, R., C. Hasenberg, T., J. Vac. Sci. Technol. A 9, 1395 (1991).Google Scholar
9 Chason, E., M. Mayer, T., Payne, A., Wu, D., Appl. Phys. Lett. 60, 2353 (1992).Google Scholar
10 Chason, E., T. Warwick, D., Mater. Res. Soc. Symp. Proc. 208, 351 (1991).Google Scholar
11 Chason, E., Tsao, J.Y., Horn, K.M., Picraux, S.T., Atwater, H.A., J. Vac. Sci. Technol. A8, 2507 (1990).Google Scholar
12 F. Ziegler, J., P. Biersack, J., Littmark, U., The Stopping and Range of Ions in Solids, (Pergamon Press, New York, 1985).Google Scholar
13 Floro, J.A., Kellerman, B.K., Chason, E., Picraux, S.T., Brice, D.K., Horn, K.M., J. Appl. Phys. 77, 2351(1995)Google Scholar