Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-23T12:38:54.522Z Has data issue: false hasContentIssue false
  • English
  • Français

Sputter deposited ZnO porous films for sensing applications

Published online by Cambridge University Press:  18 January 2013

Michał A. Borysiewicz ,
Elżbieta Dynowska ,
Valery Kolkovsky ,
Maciej Wielgus ,
Krystyna Gołaszewska ,
Eliana Kamińska ,
Marek Ekielski ,
Przemysław Struk ,
Tadeusz Pustelny  and
Anna Piotrowska
Michał A. Borysiewicz
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
Elżbieta Dynowska
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland Institute of Physics, PAS, Al. Lotników 32/46, 02-668 Warsaw, Poland
Valery Kolkovsky
Affiliation:
Institute of Physics, PAS, Al. Lotników 32/46, 02-668 Warsaw, Poland
Maciej Wielgus
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland Warsaw University of Technology, Pl. Politechniki 1, 00-661 Warsaw, Poland
Krystyna Gołaszewska
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
Eliana Kamińska
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
Marek Ekielski
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
Przemysław Struk
Affiliation:
Silesian University of Technology, ul. Akademicka 2A, 44-100 Gliwice, Poland
Tadeusz Pustelny
Affiliation:
Silesian University of Technology, ul. Akademicka 2A, 44-100 Gliwice, Poland
Anna Piotrowska
Affiliation:
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
Get access

Abstract

Nanoporous ZnO films are fabricated using a two step approach: sputter deposition of porous Zn followed by an ex-situ annealing in an oxygen flow at 400°C. The created structures have a porosity of 34% enabling use in surface-based absorption sensors. The films are used in a resistance-based sensor allowing easy discrimination between liquid methanol and ethanol by resistance measurements and also in a transmission-based sensor to detect NO2, NH3 and H2 gases in concentration as low as 500 ppm.

Keywords

oxidesensorsputtering
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1494: Symposium Z – Oxide Semiconductors and Thin Films , 2013 , pp. 71 - 76
Copyright
Copyright © Materials Research Society 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Liu, Xiang, Wu, Xiaohua, Cao, Hui, and Chang, R. P. H., J. Appl. Phys. 95, 3141 (2004)CrossRefGoogle Scholar
Shi, J., Hong, H., Ding, Y., Yang, Y., Wang, F., Cai, W. and Wang, X., J. Mater. Chem. 21, 9000 (2011)CrossRefGoogle Scholar
Borysiewicz, M.A., Dynowska, E., Kolkovsky, V., Dyczewski, J., Wielgus, M., Kamińska, E., Piotrowska, A., Phys. Stat. Sol. A 209, 2463 (2012)CrossRefGoogle Scholar
Costa, M.F.M. J. Phys. Conf. Series 274, 012053 (2011)CrossRefGoogle Scholar
Yang, Z.Y. and Zhao, M., J. Opt. A: Pure Appl. Opt. 9 872 (2007)CrossRefGoogle Scholar