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Spectroscopic Ellipsometry Characterization of La2Ti2O7 Thin Films

Published online by Cambridge University Press:  15 February 2011

Bryan D. Dickerson ,
Masaya Nagata ,
Y.J. Song ,
H.D. Nam  and
Seshu B. Desu
Bryan D. Dickerson
Affiliation:
Materials Science and Eng., Virginia Polytechnic Inst. and State Univ., Blacksburg, VA, 24061
Masaya Nagata
Affiliation:
Functional Devices Laboratories, Sharp Corporation, Chiba, Japan
Y.J. Song
Affiliation:
Materials Science and Eng., Virginia Polytechnic Inst. and State Univ., Blacksburg, VA, 24061
H.D. Nam
Affiliation:
Department of Electronic Engineering, Yeungnam Univ., Korea
Seshu B. Desu
Affiliation:
Materials Science and Eng., Virginia Polytechnic Inst. and State Univ., Blacksburg, VA, 24061
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Abstract

Optical properties of La2Ti2O7 thin films were investigated by spectroscopie ellipsometry and compared to those of bulk sintered ceramics. Thin films were prepared by pulsed laser deposition (PLD) from bulk targets. To separate the effects of thickness, porosity, and index of refraction on observed Ψ and δspectra in thin films, a Cauchy model for n vs. λ was developed from sintered samples, with known porosity. Assuming the effective bulk index of refraction followed the rule of mixtures, corrected models for La2Ti2O7 without porosity were used to determine thickness and porosity of thin films as a function of fabrication parameters such as laser energy, substrate material and temperature. Ellipsometry models were tested and refined through XRD, EDX, ESCA, and SEM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 197
Copyright
Copyright © Materials Research Society 1995

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References

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