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Spectroscopic Diagnostics and Kinetics of Low Pressure Processing Plasmas

Published online by Cambridge University Press:  28 February 2011

Alan Garscadden
Alan Garscadden*
Affiliation:
Air Force Wright Aeronautical Laboratories Wright-Patterson AFB OH 45433
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Abstract

A review is presented of a negative glow model of low frequency, low pressure plasma reactors and the salient features are described using silane mixtures as the example.The input requirements for this model and similar models are also discussed in order to establish the sensitivity of the homogeneous plasma reactions to operational conditions.Calculations are presented to demonstrate the sensitivity to mixture ratios, buffer gas type and power loading.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 127
Copyright
Copyright © Materials Research Society 1986

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