Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-29T09:25:59.166Z Has data issue: false hasContentIssue false
  • English
  • Français

Spectral Sensitivities of X-Ray Diffraction to the Roughness of Si/SiO2 Interfaces

Published online by Cambridge University Press:  21 February 2011

K.W. Evans-Lutterodt  and
Mau-Tsu Tang
K.W. Evans-Lutterodt
Affiliation:
AT&T Bell Laboratories Murray Hill, NJ 07974
Mau-Tsu Tang
Affiliation:
S.R.R.C, Taiwan R.O.C.
Get access

Abstract

Results from X-ray diffraction studies of the morphology of the growing Si(001 )/SiO2 interface are presented. We show the evolution of the root mean square roughness as a function of the growth variables, and we try to go beyond the root mean square parametrization of the interface by measuring the spectral distribution of interface fluctuations. Within our current experimental sensitivies we cannot resolve any fluctuations with a finite in-plane momentum transfer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 399: Symposium D – Evolution of Epitaxial Structure and Morphology , 1995 , 531
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Fowler, A.B. and Stem, F., Rev. Mod. Phys., 54 p. 437, (1982).Google Scholar
2 Ando, T., J. Phys. Soc, 43 p. 1616, (1977).Google Scholar
3 Stern, F., Solid State Commun., 21 p. 163 (1977)Google Scholar
4 Church, E.L. and Zavada, J.M., Appl. Opt., 14 1788 (1975).Google Scholar
5 Tang, M.T., Evans-Lutterodt, K.W., Green, M.L., Brasen, D., Krisch, K., Manchanda, L., Higashi, G.S. and Boone, T., Appl. Phys. Lett., 64 (1994).Google Scholar
6 Dawson, J.L., Krisch, K., Evans-Lutterodt, K.W., Tang, M.T., Manchanda, L., Green, M.L., Brasen, D., Higashi, G.S and Boone, T., J. Appl. Phys., 77 p. 4746 (1995).Google Scholar
7 Rice, S.O., Comm. Pure Appl. Math., 4 351 (1951).Google Scholar