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Species Temporal and Spatial Distributions in Laser Ablation Plumes

Published online by Cambridge University Press:  01 January 1992

John W. Hastie ,
David W. Bonnell ,
Albert J. Paul  and
Peter K. Schenck
John W. Hastie
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
David W. Bonnell
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
Albert J. Paul
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
Peter K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
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Abstract

The intermediate species present in laser ablation plumes, particularly those formed during pulsed laser deposition (PLD) of thin films, have been identified for a variety of advanced materials systems. Optical multichannel analysis spectroscopy has been used to monitor the atomic and ionic species present, via their spectral emissions. Molecular beam-sampling mass spectrometry has been used to monitor the molecular species present, in addition to atoms and ions. With both monitoring approaches, temporal and spatial species distribution information has been obtained. Velocity distributions, obtained from the time-dependent mass spectral studies, show the effects of isentropic expansion to be predominant when compared with gasdynamic models of the plume evolution process. Also, the plume structure was found to be particularly sensitive to target elemental distribution. Examples of systems studied include high temperature superconductors, refractory compounds, ferroelectrics and nanostructured magnetic films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 39
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Duley, W.W., CO2 Lasers: Effects and Applications, (Academic Press, 1976).Google Scholar
2. Duley, W.W., Laser Processingand Analysis of Materials, (Plenum Press, 1983).Google Scholar
3. Smith, H.M. and Turner, A.F., ‘Vacuum Deposited Thin Films using a Ruby Laser,’ Appl. Opt., 4(1), 147 (1965).Google Scholar
4.MRS Bulletin, 27, (February 1991); see also for literature citations of earlier work.Google Scholar
5. Hastie, J.W., Bonnell, D.W. and Schenck, P.K., High Temp.-High Press., 20, 73 (1988).Google Scholar
6. Hastie, J.W., Bonnell, D.W., and Schenck, P.K., High Temp. Sci., 25, 117 (1988).Google Scholar
7. Hastie, J.W., Pure and Applied Chem., 56, 1583 (1985).Google Scholar
8. Hastie, J.W., Bonnell, D.W., and Schenck, P.K., NBSIR 84–2940 (1984).Google Scholar
9. Schenck, P.K., Bonnell, D.W., and Hastie, J.W., High Temp. Sci., 27, 483 (1990).Google Scholar
10. Bonnell, D.W., Schenck, P.K., and Hastie, J.W., MRS Proc., 129, 353 (1989).Google Scholar
11.NIST Standard Reference Database 38, ‘NIST Spectroscopic Properties of Atoms and Atomic Ions,’ (NIST, Gaithersburg, MD, 1992).Google Scholar
12. Bonnell, D.W., Schenck, P.K., Hastie, J.W., and Joseph, M., ‘Ultra-High Temperature Laser Vaporization Mass Spectrometry of SiC and HfO2,’ Proc. Symposium on High Temp. Chemistry, (Electrochemical Society, NJ, 1990).Google Scholar
13. Schenck, P.K., Bonnell, D.W., and Hastie, J.W., J. Vac. Sci., A7, 1745 (1989).Google Scholar
14. Vaudin, M.D., Cook, L.P., Wong-Ng, W., and Schenck, P.K., MRS Proc., 243, 513 (1992).Google Scholar
15. Paul, A.J., Bonnell, D.W., Hastie, J.W., Schenck, P.K., Shull, R.D., and Ritter, J.J., MRS Proc., 236, 456 (1992).Google Scholar
16. Schenck, P.K., Cook, L.P., Zhao, J., Hastie, J.W., Farabaugh, E.N., Chiang, C.K., Vaudin, M.D. and Brody, P.S., MRS Proc., 157, 587 (1989).Google Scholar
17. Kelly, R. and Dreyfus, R.W., J. Surf Sci 193, 263 (1988). See also, Kelly, and Dreyfus, , Nucl. Inst. Meth. Phys. Res., B32, 341 (1988).Google Scholar