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Spatially Resolved Characterization of Plastic Deformation Induced by Focused-Ion Beam Processing in Structured InGaN/GaN Layers

Published online by Cambridge University Press:  01 February 2011

R. Barabash ,
G. Ice ,
R. Kroger ,
H. Lohmeyer ,
K. Sebald ,
J. Gutowski ,
T. Bottcher ,
D. Hommel ,
W. Liu  and
J.-S. Chung
R. Barabash
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States, 865-2417230, 865-5747659
G. Ice
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States
R. Kroger
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
H. Lohmeyer
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
K. Sebald
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
J. Gutowski
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
T. Bottcher
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
D. Hommel
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
W. Liu
Affiliation:
[email protected], Advanced Photon Source, Argonne, IL, 60439, United States
J.-S. Chung
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States
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Abstract

In this study the results of polychromatic X-ray microbeam analysis (PXM) of the structural changes caused by FIB in nitride heterostructures are presented and discussed in connection with micro-photoluminescence (μ-PL), fluorescent analysis, scanning electron (SEM) and transmission electron microscopy (TEM) data. It is shown that FIB processing distorts the lattice in the InGaN/GaN layer not only in the immediate vicinity of the processed area but also in the surroundings. A narrow amorphidized top layer is formed in the direct ion beam impact area.

Keywords

ion-beam processingIII-Vx-ray diffraction (XRD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG01-07
Copyright
Copyright © Materials Research Society 2007

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References

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