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Space Distribution of Deep Levels in SiGe/Si Heterostructure
Published online by Cambridge University Press: 22 February 2011
Abstract
The small-pulse DLTS had been developed to measure distribution of deep levels in CVD grown SiGe/Si heterostructure before and after thermal processing at 800°C. Changes of defect states was found and after processing the original single deep level 0.62eV under the condition band split into two separated traps. A new weak deeper trap signal was found only in the just relaxed region. It could be Ge-related defect complex with misfit dislocations.
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- Copyright © Materials Research Society 1994
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