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Sol-Gel Synthesis of thin Films for use as Planar Waveguides*

Published online by Cambridge University Press:  28 February 2011

G.W. Dale ,
H.H. Fox ,
Brian J.J. Zelinski  and
Laura Weller-Brophy
G.W. Dale
Affiliation:
Materials Science and Engineering Department,Arizona Materials Laboratory,University of Arizona,Tucson,Arizona 85721
H.H. Fox
Affiliation:
Materials Science and Engineering Department,Arizona Materials Laboratory,University of Arizona,Tucson,Arizona 85721
Brian J.J. Zelinski
Affiliation:
Optical Data Storage Center,Optical Sciences Center,University of Arizona,Tucson,Arizona 85721
Laura Weller-Brophy
Affiliation:
Optical Data Storage Center,Optical Sciences Center,University of Arizona,Tucson,Arizona 85721
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Extract

SiO2-TiO2 sol-gel solutions and synthesis techniques have been developed to produce thin films of proper index, thickness and quality for use as planar waveguides. The composition of the synthesized films ranged from 50 to 68 mole % TiO2 and produced layers with indices ranging from 1.7 to 1.8. Final film thicknesses ranged from 1000 to 3000 A and varied as a function of the coating chemistry and conditions. Also, changes in film shrinkage and index with heat treatment were determined and compared to literature data on similar films used as antireflective coatings. Finally, confirmation of the waveguiding qualities of these films was made through prism coupler measurements conducted by the University of Arizona Optical Sciences Center.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 371
Copyright
Copyright © Materials Research Society 1990

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Footnotes

*

This paper was presented at the Fourth International Conference on Ultrastructure Processing of Ceramics, Glasses, and Composites, February 19–24, 1989, Tucson, AZ. In was inadvertently omitted from publication in the Proceedings of that Conference.

References

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