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SnO2:F Thin Films with High Fluorine Contents Produced by Spray Pyrolysis at Constant Substrate Temperature

Published online by Cambridge University Press:  10 February 2011

D. R. Acosta ,
E. Zironi ,
W. Estrada  and
E. Montoya
D. R. Acosta
Affiliation:
Instituto de Física, UNAM, A.P. 20 - 364, 01000 México D.F., MEXICO
E. Zironi
Affiliation:
In Memorian
W. Estrada
Affiliation:
Universidad Nacional de Ingeniería, Fac. de Ciencias. Casilla 31 – 139. Lima, PERU
E. Montoya
Affiliation:
Universidad Nacional de Ingeniería, Fac. de Ciencias. Casilla 31 – 139. Lima, PERU
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Abstract

Fluorine doped tin oxide thin films were prepared from solutions with high fluorine contents using the spray pyrolysis technique; the resulting films were studied by electron and X-ray diffraction methods; the resonant nuclear reaction (RNR) method was used to determine the final concentration of fluorine atoms in our films for different doping levels. Also, electrical and optical properties of SnO2:F films were measured and correlated with deposition and structural parameters obtained from X-Ray diffraction and electron microscopy studies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 235
Copyright
Copyright © Materials Research Society 1997

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