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Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM

Published online by Cambridge University Press:  10 February 2011

C. Lee ,
T. Itoh ,
J. Chu ,
T. Ohashi ,
R. Maeda ,
A. Schroth  and
T. Suga
C. Lee
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan
T. Itoh*
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
J. Chu
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
T. Ohashi
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
R. Maeda
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan
A. Schroth
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
T. Suga
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
*
2 Author to whom correspondence should be addressed. e-mail: [email protected]
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Abstract

Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 35
Copyright
Copyright © Materials Research Society 1997

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Footnotes

1

Microsystems Lab., ITRI, 195, Sec. 4, Chung Hsing Rd., Chutung, Taiwan 310, Republic of China.

3

NEDO fellow on leave from Micromachine Center Japan.

References

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