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Size Dependence of Bombardment Characteristics Produced by Cluster Ion Beams

Published online by Cambridge University Press:  10 February 2011

T. Seki ,
M. Tanomura ,
T. Aoki ,
J. Matsuo  and
I. Yamada
T. Seki
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto, Japan
M. Tanomura
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto, Japan
T. Aoki
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto, Japan
J. Matsuo
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto, Japan
I. Yamada
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo Kyoto, Japan
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Abstract

Cluster ion beam processes provide new surface modification techniques, such as surface smoothing, high rate sputtering and very shallow implantation, because of the unique interactions between cluster and surface atoms. To understand interactions with cluster and surface, Scanning Tunneling Microscope (STM) observations have been done for single impact traces.

Highly Oriented Pyrolitic Graphite (HOPG) surfaces were bombarded by carbon cluster ions (Va≤300kV), and large ridges and craters have been observed as a result of single cluster ion impact. The impact site diameters are proportional to the cluster size up to 10 atoms, and increase drastically for cluster sizes above 10. This indicates that non-linear multiple collisions occur only when a local area is bombarded by more than 10 atoms at the same time.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 504: Symposium KK – Atomistic Mechanisms in Beam Synthesis & Irradiation… , 1997 , 93
Copyright
Copyright © Materials Research Society 1998

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References

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