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SIMS, SAM and RBS Study of High Dose Oxygen Implantation into Silicon
Published online by Cambridge University Press: 22 February 2011
Abstract
Secondary Ion Mass Spectrometry, Scanning Auger Microscopy, and Rutherford Backscattering Spectroscopy have been used to study a buried oxide structure on silicon formed by high dose implantation. All these surface analytical techniques give useful information about the oxygen distribution in the buried oxide structure. The difficulties in these techniques have also been assessed.
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- Copyright © Materials Research Society 1985