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Silicon-based Micro Platforms for Characterization of Nanostructured Layers With Application in Intermediate Temperature Micro Solid Oxide Fuel Cells

Published online by Cambridge University Press:  01 February 2011

Inigo Garbayo ,
Albert Tarancón ,
José Santiso ,
Andrea Cavallaro ,
Isabel Gràcia ,
Carles Cané  and
Neus Sabaté
Inigo Garbayo
Affiliation:
[email protected]
Albert Tarancón
Affiliation:
[email protected], Catalonia Institute for Energy Research (IREC), Barcelona, Spain
José Santiso
Affiliation:
[email protected], Research Center in Nanoscience and Nanotechnology, CIN2, CSIC/ICN, Bellaterra, Spain
Andrea Cavallaro
Affiliation:
[email protected], Research Center in Nanoscience and Nanotechnology, CIN2, CSIC/ICN, Bellaterra, Spain
Isabel Gràcia
Affiliation:
[email protected], National Institute of Microelectronics, IMB-CNM (CSIC), Bellaterra, Spain
Carles Cané
Affiliation:
[email protected], National Institute of Microelectronics, IMB-CNM (CSIC), Bellaterra, Spain
Neus Sabaté
Affiliation:
[email protected], National Institute of Microelectronics, IMB-CNM (CSIC), Bellaterra, Spain
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Abstract

The present work is devoted to study the development of yttria-stabilized zirconia membranes self-supported on silicon-based microplatforms, to be used as electrolytes on micro solid oxide fuel cells. The microfabrication process to obtain yttria-stabilized zirconia membranes is detailed, and some key aspects for the integration of yttria-stabilized zirconia films deposited by pulsed laser deposition on the silicon-based microplatform are shown. Moreover, the effect on the thermomechanical stability of different fabrication parameters is presented, as well as the way to control the pinhole generation on the membranes. Finally, some electrical characterization guidelines are included, in order to study the effects of the platform and the membrane dimensions on the different measurements performed.

Keywords

plasma depositionSidevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1256: Symposium N – Functional Oxide Nanostructures and Heterostructures , 2010 , 1256-N16-18
Copyright
Copyright © Materials Research Society 2010

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