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Silicon Nanocrystals Fabricated by a Novel Plasma Enhanced Hydrogenation Technique Suitable for Light Emitting Devices

Published online by Cambridge University Press:  01 February 2011

Mehdi Jamei ,
Farshid Karbassian ,
Shams Mohajerzadeh ,
Yaser Abdi ,
Pouya Hashemi ,
Michael Robertson  and
Sandra Yuill
Mehdi Jamei
Affiliation:
[email protected], Thin Film and Nanoelectronic Lab., School of ECE, University of Tehran, North kargar Ave., Faculty of Engineering,, Campus No.2, Tehran, 14395-515, Iran, +98-912-2150625
Farshid Karbassian
Affiliation:
[email protected], Thin Film and Nanoelectronic Lab., School of ECE, University of Tehran, North kargar Ave., Faculty of Engineering,, Campus No.2, Tehran, 14395-515, Iran
Shams Mohajerzadeh
Affiliation:
[email protected], Thin Film and Nanoelectronic Lab., School of ECE, University of Tehran, North kargar Ave., Faculty of Engineering,, Campus No.2, Tehran, 14395-515, Iran
Yaser Abdi
Affiliation:
[email protected], Thin Film and Nanoelectronic Lab., School of ECE, University of Tehran, North kargar Ave., Faculty of Engineering,, Campus No.2, Tehran, 14395-515, Iran
Pouya Hashemi
Affiliation:
[email protected], Thin Film and Nanoelectronic Lab., School of ECE, University of Tehran, North kargar Ave., Faculty of Engineering,, Campus No.2, Tehran, 14395-515, Iran
Michael Robertson
Affiliation:
[email protected], Acadia University, Physics, Acadia University, Wolfville, NS B4P 2R6, Canada
Sandra Yuill
Affiliation:
[email protected], Acadia University, Physics, Acadia University, Wolfville, NS B4P 2R6, Canada
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Abstract

The preparation of nano-crystalline silicon suitable for optoelectronic purposes by plasma-enhanced hydrogenation is reported. The method is compatible with mature ULSI technology because of its low temperature and non-wet processing environment. Visible light emission with peak wavelengths ranging from blue to red has been observed and could be tuned by varying the processing conditions. While the blue light emission may be due to surface defects present in the oxide layer, the green and red light emissions are believed to be due excitonic emission within the nano-crystalline grains as a result of quantum confinement effects. The layers were studied by SEM, TEM, CL and FTIR. A LED was fabricated and electroluminescence demonstrated.

Keywords

Sihydrogenationluminescence
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 958: Symposium L – Group IV Semiconductor Nanostructures—2006 , 2006 , 0958-L07-05
Copyright
Copyright © Materials Research Society 2007

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References

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