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Silica-Based Single-Mode Waveguides and Their Applications to Integrated-Optic Devices

Published online by Cambridge University Press:  21 February 2011

Norio Takato  and
Akio Sugita
Norio Takato
Affiliation:
NTT Opto-Electronics Laboratories, Tokai, Ibaraki-ken, Japan
Akio Sugita
Affiliation:
NTT Opto-Electronics Laboratories, Tokai, Ibaraki-ken, Japan
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Abstract

Low-loss silica-based single-mode waveguides are fabricated on Si substrates by flame hydrolysis deposition and reactive ion etching. The waveguide loaded with a thin film heater operates as a phase shifter due to the refractive index dependence on temperature. The phase shifter can afford optical switching and/or tuning functions for silica-based integrated-optic devices. The waveguides have large stress-induced birefringence due to the difference in thermal expansion coefficients between SiO2 and Si. Waveguide birefringence control techniques are proposed for constructing various polarization insensitive and sensitive devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 172: Symposium P – Optical Fiber Materials and Processing , 1989 , 253
Copyright
Copyright © Materials Research Society 1990

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