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Shaping of Diamonds in 1D Nanostructures and Strategies for Fabrication of All-Diamond Microcomponents

Published online by Cambridge University Press:  19 April 2012

S. Orlanducci ,
V. Guglielmotti ,
V. Sessa ,
E. Tamburri ,
M.L. Terranova ,
F. Toschi  and
M. Rossi
S. Orlanducci
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
V. Guglielmotti
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
V. Sessa
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
E. Tamburri
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
M.L. Terranova
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
F. Toschi
Affiliation:
Dept. of Chemical Science and Technology, University of Rome ‘Tor Vergata’, 00133, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
M. Rossi
Affiliation:
Dept. of Fundamental and Applied Sciences for Engineering, Sapienza University, 00161, Roma, Italy NanoShare s.r.l.www.nanoshare.eu
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Abstract

The fabrication of low-dimensional diamond materials in form of nanowires is a stringent requirement for advanced electronic applications. However, the nanometric control of diamond materials into desired and tailored geometries, as those ones required for applications in the field of nano-photonics, is a really challenging and complex task using currently available processes. In the present paper we describe some recent results obtained using plasma-induced processes for the shaping of diamond films in fascinating 1D structures, such as nanowires, nanowhiskers and nanopillars, to be integrated in devices of technological interest.

Keywords

diamondplasma-enhanced CVD (PECVD) (chemical reaction)nanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1395: Symposium N – Diamond Electronics and Biotechnology–Fundamentals to Applications V , 2012 , mrsf11-1395-n12-27
Copyright
Copyright © Materials Research Society 2012

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References

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