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Sensing Properties of CNT hybrid MOS-based Sensors

Published online by Cambridge University Press:  01 February 2011

Wei-Jen Liou ,
Tsung-Yeh Yang ,
Kuang-Nan Lin ,
Ching-Hong Yang  and
Hong-Ming Lin
Wei-Jen Liou
Affiliation:
Department of Materials Engineering, Tatung University, Taipei 104, Taiwan, R.O.C.
Tsung-Yeh Yang
Affiliation:
Department of Materials Engineering, Tatung University, Taipei 104, Taiwan, R.O.C.
Kuang-Nan Lin
Affiliation:
Department of Materials Engineering, Tatung University, Taipei 104, Taiwan, R.O.C.
Ching-Hong Yang
Affiliation:
Department of Materials Engineering, Tatung University, Taipei 104, Taiwan, R.O.C.
Hong-Ming Lin
Affiliation:
Department of Materials Engineering, Tatung University, Taipei 104, Taiwan, R.O.C.
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Abstract

The carbon nanotubes provide large surface that can enhance the gas adsorption properties and increase the conductivity at a lower temperature for gas sensing. The gas sensing properties of the hybrid TiO2/CNTs material are examined in this study. The sol-gel technique is used to prepare a thin layer of nano-TiO2 coated on CNTs. The structure of TiO2/CNTs hybrid materials is identified by X-ray diffraction (XRD) and Raman spectrum. The granules and surface morphology are analyzed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The electrical properties of the hybrid TiO2/CNTs indicate that the operation temperature can be lowered to ambient temperature and this will enhance the gas sensitivity for detecting CO gas. The n-type or p-type behavior of hybrid TiO2/CNTs can be controlled by the coating thickness of hybrid TiO2. According to the image results, the mechanisms of the n-type and p-type behavior of hybrid TiO2/CNTs system are proposed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A2.6
Copyright
Copyright © Materials Research Society 2005

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References

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