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Semiconductor Processing with Excimer Lasers: An Overview

Published online by Cambridge University Press:  22 February 2011

R. T. Young
R. T. Young*
Affiliation:
Helionetics, Inc., San Diego, California 92123 and Solid State Division, Oak Ridge National Laboratory Oak Ridge, Tennessee 37831
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Abstract

The present level of development of excimer lasers, as it relates to semiconductor processing, and the advantages of these lasers for such processing, are reviewed. Extensive comparisons of the quality of annealing of ion-implanted Si obtained with XeCl and ruby lasers are presented. Major applications in the area of solar cell fabrication, siliconon-sapphire technology, laser photochemical processing, and submicron optical lithography are outlined and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 217
Copyright
Copyright © Materials Research Society 1984

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References

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