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Secondary Electron Emission Studies of Diamond Surfaces

Published online by Cambridge University Press:  10 February 2011

A. Shih ,
J. Yater ,
P. Pehrsson ,
J. Butler ,
C. Hor  and
R. Abrams
A. Shih
Affiliation:
Naval Research Laboratory, Washington, DC 20375
J. Yater
Affiliation:
Naval Research Laboratory, Washington, DC 20375
P. Pehrsson
Affiliation:
Naval Research Laboratory, Washington, DC 20375
J. Butler
Affiliation:
Naval Research Laboratory, Washington, DC 20375
C. Hor
Affiliation:
Naval Research Laboratory, Washington, DC 20375
R. Abrams
Affiliation:
Naval Research Laboratory, Washington, DC 20375
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Abstract

Diamond exhibits high secondary-electron yields which vary strongly with sample preparation and sample treatment. In this study, we identify some of the factors that govern the secondary-electron emission yield of diamond. Comparative studies are made with polycrystalline diamond films having different dopants (boron or nitrogen), dopant concentrations and surface conditions (hydrogen-terminated or oxidized). In these studies, the total electron yield as a function of the incident-electron energy and the energy distribution of the secondary emitted electrons are measured. The results show that both electrical conductivity and hydrogen-termination play essential roles in the secondary-electron emission process. For hydrogen-terminated samples, the energy distribution shows a large and narrow peak at the onset of electron emission. The long mean-free path of the secondary electrons and the low or negative electron affinity are essential to the exceedingly high electron yield of diamond.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 461
Copyright
Copyright © Materials Research Society 1996

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References

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