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Saturation, Exchange and Retention of Implanted D/H Ions in Fused Silica
Published online by Cambridge University Press: 15 February 2011
Abstract
Elastic recoil detection techniques have been used to measure hydrogen isotope profiles in fused silica implanted with 20 keV H and/or D ions. Saturation is obtained for both H and D implantations at a concentration of 2.2 × 1021 ions/cm3. H and D exchange are observed for saturated samples subsequently implanted with a different H isotope. A previously developed local mixing model of H-trapping has been extended to include retrapping and beam-induced detrapping for application to these studies. This theoretical analysis provides a good fit to the H/D saturation and isotope exchange behavior. Isochronal annealing shows that both H and D are released in a single stage centered about 550°C.
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- Copyright © Materials Research Society 1982
Footnotes
This work performed at Sandia National Laboratories supported by the U.S. Department of Energy under contract number DE-AC04-76DP00789.