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Role of Interface Quality and Film Doping Density in Amorphous Si / Crystalline Si Heterojunctions for Photovoltaic Applications
Published online by Cambridge University Press: 01 February 2011
Abstract
We have studied some key aspects of the (n+)a-Si/(p)c-Si heterojunction structures photovoltaic applications. The importance of the hetero-interface quality has been studied by both theoretical simulations and experimental characterization. The surface treatment prior to the film deposition is very critical. Even though H-plasma passivation can help passivate bulk defects in low quality Si, extreme care should be taken to avoid plasma induced surface damage which will result in a defective hetero-interface. Furthermore, (n+) a-Si films with different doping levels have also been characterized and their influence on the device performance has been studied.
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- Copyright © Materials Research Society 2004