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The Role of Hydrogen in Silicon Microcrystallization

Published online by Cambridge University Press:  21 February 2011

S. Wagner ,
S.H. Wolff  and
J.M. Gibson
S. Wagner
Affiliation:
Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08544
S.H. Wolff
Affiliation:
Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08544
J.M. Gibson
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
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Abstract

We report and interpret two groups of experiments on the role that hydrogen plays in the formation of silicon microcrystals. We show that the growth of singlecrystal Si by molecular beam epitaxy at 475°C is disrupted by H2, which induces the formation of microcrystals. In crystallization experiments of non-hydrogenated a-Si and of hydrogenated a-Si:H on a hot stage in a transmission electron microscope, hydrogen facilitates the nucleation of crystallites. We explain our observations with a substantial reduction of the grain boundary energy by hydrogen.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 161
Copyright
Copyright © Materials Research Society 1990

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