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Resonant Fatigue Testing of Cantilever Specimens Prepared from Thin Films

Published online by Cambridge University Press:  01 February 2011

Kwangsik Kwak ,
Masaaki Otsu  and
Kazuki Takashima
Kwangsik Kwak
Affiliation:
[email protected], Kumamoto University, Department of Materials Science and Engineering, Kumamoto, Japan
Masaaki Otsu
Affiliation:
[email protected], Kumamoto University, Department of Materials Science and Engineering, Kumamoto, Japan
Kazuki Takashima
Affiliation:
[email protected], Kumamoto University, Department of Materials Science and Engineering, Kumamoto, Japan
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Abstract

Fatigue properties of thin film materials are extremely important to design durable and reliable microelectromechanical systems (MEMS) devices. However, it is rather difficult to apply conventional fatigue testing method of bulk materials to thin films. Therefore, a fatigue testing method fitted to thin film materials is required. In this investigation, we have developed a fatigue testing method that uses a resonance of cantilever type specimen prepared from thin films. Cantilever beam specimens with dimensions of 1(W) × 3(L) × 0.01(t) mm3 were prepared from Ni-P amorphous alloy thin films and gold foils. In addition, cantilever beam specimens with dimension of 3(L) × 0.3(W) × 0.005(t) mm3 were also prepared from single crystalline silicon thin films. These specimens were fixed to a holder that is connected to an golddio speaker used as an actuator, and were resonated in bending mode. In order to check the validity of this testing method, Young's moduli of these specimens were measured from resonant frequencies. The average Young's modulus of Ni-P was 108 GPa and that of gold foil specimen was 63 GPa, and these values were comparable with those measured by other techniques. This indicates that the resonance occurred theoretically-predicted manner and this testing method is valid for measuring the fatigue properties of thin films. Resonant fatigue tests were carried out for these specimens by changing amplitude range of resonance, and S-N curves were successfully obtained.

Keywords

fatiguethin filmmicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1139: Symposium GG – Microelectromechanical Systems–Materials and Devices II , 2008 , 1139-GG03-17
Copyright
Copyright © Materials Research Society 2009

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References

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