Hostname: page-component-cd9895bd7-dzt6s Total loading time: 0 Render date: 2024-12-27T02:29:21.801Z Has data issue: false hasContentIssue false
  • English
  • Français

Resistless Etching of SiO2 by Two Color Excimer Lasers

Published online by Cambridge University Press:  25 February 2011

T. Obara  and
M. Murahara
T. Obara
Affiliation:
Graduate Student of Tokai Univ., Faculty of Eng
M. Murahara
Affiliation:
Faculty of Eng., Tokai Univ., 1117, Kitakaname, Hiratuka, Kanagawa 259-12, Japan
Get access

Abstract

Resistless etching of thermal oxide silicon filmes were demonstrated by ArF & KrF excimer lasers, and CC12F2 gases. CC12F2 was decomposed by ArF excimer laser light, and CF2 radicals were produced. These radicals, which have absorption band nearby 250nm, were vary stable. Then the circuit pattarned KrF laser light was irradiated on the SiO2 in an atomsphere of CF2 radicals. As thse result, the etching pattern of 2 μ m width was performed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 65
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1) Akazawa, H., Utsumi, Y., Takahashi, J. and Urisu, T.; A.P.L.,57,2302 1990 Google Scholar
2) Takigawa, T., Kurosawa, H. and Sasaki, W.; J.Non-Crystal Solids.,116,293 1990 Google Scholar
3) Brannon, J.H.; J.Phys.Chem.,90,1784 1986 Google Scholar
4) Robbert, R.E. and , Ausloos; J.Photochem.,4,419 1975 CrossRefGoogle Scholar
5) Simons, J.P. and Yarwood, A.J.; Trans, Faraday Soc.,59,90 1963 Google Scholar
6) Okabe, H,Photo Chemisty of Small molecules,John Wiley & Sons,New York: 373,(1978)Google Scholar
7) Milligan, D.E., Mann, D.E. and Jacox, M.E.; J.Chem.Phys.,41,5 1964 Google Scholar
8) Matland, C.W.;Phs.Rev.,92,637 1953 Google Scholar
9) Lopper, G.L. and Tabat, M.D.; A.P.L.,46,654 1985 Google Scholar
10) Murahara, M., Masaru, M. and Shirakawa, K.; M.R.S.1989 Fall Meeting,vol.158, 295 (1989)Google Scholar
11) Murahara, M., Yonekawa, M. and Shirakawa, K.; CLEO'90, CW86,228 1990 Google Scholar
12) Srinivasan, R.; CLEO'89, THD4,264 1989 Google Scholar