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Residual Stress in and Microstructure of Fe and Ti Surface Layers After 1 Mev N+ Implantation at High Dose

Published online by Cambridge University Press:  25 February 2011

A.M. Vredenberg ,
F.W. Saris ,
N.M. v.d. Pers ,
P.F. Colijn ,
Th.H. de Keijser  and
E.J. Mittemeijer
A.M. Vredenberg
Affiliation:
FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
F.W. Saris
Affiliation:
FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
N.M. v.d. Pers
Affiliation:
Laboratory of Metallurgy, Delft University of Technology, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
P.F. Colijn
Affiliation:
FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
Th.H. de Keijser
Affiliation:
Laboratory of Metallurgy, Delft University of Technology, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
E.J. Mittemeijer
Affiliation:
Laboratory of Metallurgy, Delft University of Technology, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
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Abstract

The effect of 1 MeV N+ irradiation on the microstructure of Fe and Ti specimens was investigated. The Fe and Ti specimens were implanted such that the N peak concentration (30 at.% in Fe, 45 at.% in Ti), was below the concentration of N in ε-Fe2N and δ-TiN, respectively. X-ray diffraction phase analysis showed that ε-Fe2N and δ-TiN had formed. X-ray diffraction stress analysis indicated that the residual stress in the Fe and Ti matrices was negligible after implantation. This suggests that the volume misfit due to nitride formation had been accommodated by plastic deformation. Indeed, surface profilometry of implanted Fe showed that a volume increase of the specimen had occurred which was compatible with the formation of unstrained nitride .

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 853
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1 Hartley, N.E.W., Thin Solid Films 64 (79) 177.Google Scholar
2 Dearnaley, G., Rad. Effects 63 (82) 1.Google Scholar
3 Hirvonen, J.K., Treatise on Materials Science and Technology, Vol. 18 (Academic Press, New York, 1980).Google Scholar
4 Dearnaley, G., in Preece, CM. and Hirvonen, J.K. (eds.), Ion Implantation Metallurgy, Proc. Conf. (Metallurgical Society of AIME, Warrendale, PA, 1980), p. 1.Google Scholar
5 Cui, F.Z., Vredenberg, A.M. and Saris, F.W., Appl. Phys. Lett. 53 (88) 2152.Google Scholar
6 Vredenberg, A.M., Cui, F.Z., Saris, F.W., van der Pers, N.M. and Colijn, P.F., Mater. Sci. Eng. A115 (89) 297.Google Scholar
7 Hartley, N.E.W., J. Vac. Sci. Technol. 12 (75) 485.Google Scholar
8 Vredenberg, A.M., Saris, F.W., v.d. Pers, N.M., Colijn, P.F., de Keijser, Th.H. and Mittemeijer, EJ., to be published.Google Scholar
9 Polman, A., Vredenberg, A.M., Urbanus, W.H., van Deenen, P.J., Alberda, H., Krop, H., Attema, I., de Haas, E., Kersten, H., Doom, S., Derks, J., ter Beek, J., Roorda, S., Schreutelkamp, R., Bannenberg, J.G. and Saris, F.W., Nucl. Instr. Methods B37/38 (89) 935.Google Scholar
10 Jack, K.H., Acta Cryst. 5 (52) 404.Google Scholar
11 Firrao, D., De Benedetti, B. and Rosso, M., Metall. Ital. 9 (79) 373.Google Scholar
12 Pearson, W.B., A Handbook of Lattice Spacings and Structure of Metals and Alloys (Fergamon Press, New York, 1958), p. 998.Google Scholar
13 Delhez, R., de Keijser, Th. H. and Mittemeijer, E.J., Surf. Eng. 3 (87) 331.Google Scholar
14 Hauk, V.M. and Macherauch, E., Adv. X-Ray Anal. 27 (83) 81.Google Scholar
15 Evenschor, P.D., Frohlich, W. and Hauk, V., Z. Metallkd. 62 (71) 38.Google Scholar
16 Earnisse, E.P. and Picraux, S.T., J. Appl. Phys. 48 (77) 9.Google Scholar