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Renaissance and Progress in Nitride Semiconductors - My Personal History of Nitride Research -

Published online by Cambridge University Press:  17 March 2011

Isamu Akasaki*
Affiliation:
Dept. Materials Science and Engineering, and High-Tech Research Center, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, JAPAN
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Abstract

Wide bandgap group-III nitride semiconductors are currently experiencing the most exciting development. High brightness blue and green light emitting diodes (LEDs) are commercialized, and UV and blue laser diodes (LDs), high-speed transistors (TRs) and UV photodetectors (PDs) with low dark current, which will be able to operate in harsh environments, have been demonstrated. In this paper, renaissance and progress in crystal growth and conductivity control of nitride semiconductors in the last quarter century are reviewed as the groundwork for all of those high-performance devices. My personal history of nitride research will be also introduced.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

[1] Johnson, W. C., Parsons, J. B. and Crew, M. C., J. Phys. Chem. 36, 2561 (1932).Google Scholar
[2] Grimmeiss, H. G. and H-Koelmans, Z., Naturforschung 14a, 264 (1959).Google Scholar
[3] Maruska, H. P. and Tietjen, J. J., Appl. Phys. Lett. 15, 367 (1969).Google Scholar
[4] Dingle, R., Shaklee, K. L., Leheny, R. F. and Zetterstrom, R. B., Appl. Phys. Lett. 19, 5 (1971).Google Scholar
[5] Pankove, J. I., Miller, E. A., Richman, D. and Berkeyheiser, J. E., J. Lumin. 4, 63 (1971).Google Scholar
[6] Ejder, E., Physica Status Solidi A6, 445 (1971).Google Scholar
[7] Monemar, B., Phys. Rev. B10, 676 (1974).Google Scholar
[8] Jacob, G., Boulou, M. and Bois, D., J. Lumin. 17, 263 (1978).Google Scholar
[9] Akasaki, I. and Hashimoto, M., Solid State Commun., 5, 851 (1967).Google Scholar
[10] Akasaki, I. and Hayashi, I., Kogyo Gijutu 17, 48 (1976) [in Japanese].Google Scholar
[11] Ohki, Y., Toyoda, Y., Kobayashi, H. and Akasaki, I., Inst. Phys. Conf. Ser. 63, 479 (1981).Google Scholar
[12] Akasaki, I., Amano, H., Sawaki, N., Hashimoto, M., Ohki, Y. and Toyoda, Y., Japan Annual Reviews in Electronics, Computers & Telecommunications, 19, Semicond. Tech. 295 (1986).Google Scholar
[13] Amano, H., Kitoh, M., Hiramatsu, K. and Akasaki, I., Jpn. J. Appl. Phys. 28, L2112 (1989).Google Scholar
[14] Amano, H., Sawaki, N., Akasaki, I. and Toyoda, Y., Appl. Phys. Lett. 48, 353 (1986).Google Scholar
[15] Akasaki, I., Amano, H., Koide, Y., Hiramatsu, K. and Sawaki, N., J. Crystal Growth, 98, 209 (1989).Google Scholar
[16] Akasaki, I., Amano, H., Kitoh, M., Hiramatsu, K. and Sawaki, N., 175th Electrochemical Society Meet. 1989, & H. Amano and I. Akasaki, Ext. Abstr. Mater. Res. Soc. 1990, EA-21, p. 165.Google Scholar
[17] Akasaki, I. and Amano, H., Mater. Res. Soc. Symp. Proc. 242, 383 (1992), & I. Akasaki and H. Amano, Ext. Abstr. Int. Conf. Solid State Devices and Materials, Tsukuba, 1992, S-I-1.Google Scholar
[18] Yamasaki, S., Asami, S., Shibata, N., Koike, M., Tanaka, T., Amano, H. and Akasaki, I., Appl. Phys. Lett. 66, 1112 (1995).Google Scholar
[19] Murakami, H., Asahi, T., Amano, H., Hiramatsu, K., Sawaki, N. and Akasaki, I., J. Crystal Growth, 115, 648 (1991).Google Scholar
[20] Akasaki, I., Amano, H., Itoh, K., Koide, N. and Manabe, K., Inst. Phys. Conf. Ser. 129, 851 (1992).Google Scholar
[21] Nakamura, S., Mukai, T. and Senoh, M., Appl. Phys. Lett. 64, 1687 (1994).Google Scholar
[22] Amano, H., Asahi, T. and Akasaki, I., Jpn. J. Appl. Phys. 29, L205 (1990).Google Scholar
[23] Akasaki, I. and Amano, H., Mater. Res. Soc. Symp. Proc. 339, 443 (1994).Google Scholar
[24] Akasaki, I., Amano, H., Sota, S., Sakai, H., Tanaka, T. and Koike, M., Jpn. J. Appl. Phys. 34, L1517 (1995).Google Scholar
[25] Nakamura, S., Senoh, M., Nagahama, S., Iwasa, N., Yamada, T., Matsushita, T., Kiyoku, H. and Sugimoto, Y., Jpn. J. Appl. Phys. 35, L74 (1996).Google Scholar
[26] Nakamura, S., Senoh, M., Iwasa, N., Nagahama, S., Yamada, T. and Mukai, T., Jpn. J. Appl. Phys. 34, L1332 (1995).Google Scholar
[27] Akasaki, I., Amano, H. and Suemune, I., Proc. Int. Conf. Silicon Carbide and Related Materials, Kyoto, 1995, MoA–I.Google Scholar
[28] Amano, H. and Akasaki, I., Ext. Abstr. Int. Conf. Solid State Devices and Materials, Osaka, 1995, V-7, p. 683.Google Scholar
[29] Takeuchi, T., Takeuchi, H., Sota, S., Sakai, H., Amano, H. and Akasaki, I., Jpn. J. Appl. Phys. 36, L177 (1997).Google Scholar
[30] Takeuchi, T., Sota, S., Katsuragawa, M., Komori, M., Takeuchi, H., Amano, H. and Akasaki, I., Jpn. J. Appl. Phys. 36, L382 (1997).Google Scholar
[31] Akasaki, I. and Amano, H., Mater. Res. Soc. Symp. Proc. 242, 383 (1992).Google Scholar
[32] Takeuchi, T., Detchprohm, T., Iwaya, M., Hayashi, N., Isomura, K., Kimura, K., Yamaguchi, M., Amano, H., Akasaki, I., Kaneko, Yw., Shioda, R., Watanabe, S., Hidaka, T., Yamaoka, Y. and Kaneko, Ys., Appl. Phys. Lett. 75, 2960 (1999).Google Scholar
[33] Pernot, C., Hirano, A., Amano, H. and Akasaki, I., Jpn. J. Appl. Phys. 37, L1202 (1998).Google Scholar
[34] Nishinaga, T., Nakano, T. and Zhang, S., Jpn. J. Appl. Phys. 27, L964 (1988).Google Scholar
[35] Iwaya, M., Takeuchi, T., Yamaguchi, S., Wetzel, C., Amano, H. and Akasaki, I., Jpn. J. Appl. Phys. 37, L316 (1998).Google Scholar
[36] Nitta, S., Kariya, M., Kashima, T., Yamaguchi, S., Amano, H. and Akasaki, I., Abstr. 3rd Int. Symp. on Control of Semicond. Interfaces, Karuizawa, 1999, B305.Google Scholar
[37] Yano, M., Detchprohm, T., Nakamura, R., Sano, S., Amano, H. and Akasaki, I., Int. Workshop on Nitride Semicond. Nagoya, 2000, PMD31.Google Scholar
[38] Khan, M. A., Hove, J. M. Van, Kuznia, J. N. and Olson, D. T., Appl. Phys. Lett. 58, 2408 (1991).Google Scholar
[39] Khan, M. A., Kuznia, J. N., Olson, D. T., Hove, J. M. Van, Blasingame, M. and Reitz, L. F., Appl. Phys. Lett. 60, 2917 (1992).Google Scholar
[40] Pankove, J. I., Leksono, M., Chang, S. S., Walker, C. and Zeghbroeck, B. Van, MRS Internet J. Nitride Semicond. Res. 1, 39 (1996).Google Scholar