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Relationship of Processing Conditions to Growth Rate and Quality of Diamond Grown by Chemical Vapor Deposition

Published online by Cambridge University Press:  15 February 2011

John C. Angus ,
William D. Cassidy ,
Long Wang ,
Yaxin Wang ,
Edward Evans ,
Christopher S. Kovach  and
Michael A. Tamor
John C. Angus
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
William D. Cassidy
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
Long Wang
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
Yaxin Wang
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
Edward Evans
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
Christopher S. Kovach
Affiliation:
Chemical Engineering Department, Case Western Reserve University, Cleveland, OH 44016-7217
Michael A. Tamor
Affiliation:
Research Laboratories, Ford Motor Company, Dearborn, MI 48121-4053
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Abstract

Diamond quality is strongly coupled to growth rate. Incorporation of nondiamond (sp2) carbon and morphological instabilities both increase with increasing growth rates. The intersection of twins with the growth surface produces re-entrant corners that enhance growth in the plane of the twin. Morphology and the development of texture both depend on substrate temperature and methane concentration and hence on growth rate. Experimental evidence and modeling results that relate growth rates and quality to controllable process parameters are reviewed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 45
Copyright
Copyright © Materials Research Society 1995

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