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The Relationship Between Micropipes and Screw Dislocations in Pvt Grown 6H-Sic

Published online by Cambridge University Press:  15 February 2011

Jennifer Giocondi ,
Gregory S. Rohrer ,
Marek Skowronski ,
V. Balakrishna ,
G. Augustine ,
H. M. Hobgood  and
R. H. Hopkins
Jennifer Giocondi
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering Pittsburgh PA 15213, USA
Gregory S. Rohrer
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering Pittsburgh PA 15213, USA
Marek Skowronski
Affiliation:
Carnegie Mellon University, Department of Materials Science and Engineering Pittsburgh PA 15213, USA
V. Balakrishna
Affiliation:
Northrop Grumman Science and Technology Center Pittsburgh, PA 15235, USA
G. Augustine
Affiliation:
Northrop Grumman Science and Technology Center Pittsburgh, PA 15235, USA
H. M. Hobgood
Affiliation:
Northrop Grumman Science and Technology Center Pittsburgh, PA 15235, USA
R. H. Hopkins
Affiliation:
Northrop Grumman Science and Technology Center Pittsburgh, PA 15235, USA
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Abstract

The growth surface of a 6H-SiC boule, grown by physical vapor transport, was examined using scanning force microscopy. The dimensions of surface/micropipe intersections and screw dislocation Burgers vectors have been determined from topographic data. All micropipes are positioned along the lines of super screw dislocations with a Burgers vectors of at least 4 times the c-axis repeat distance (15.2 Å). Perfect c-axis screw dislocations with Burgers vectors of only 15.2 Å are stable and do not have open cores. Measurements show that micropipe core radii, determined indirectly from the width of the craters formed at the surface/micropipe intersections, increase with the square of the dislocation Burgers vector.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 423: Symposium E – III-Nitride, SiC, and Diamond Materials for Electronic , 1996 , 539
Copyright
Copyright © Materials Research Society 1996

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