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Re-Examining the Bulge Test: Methods for Improving Accuracy and Reliability

Published online by Cambridge University Press:  22 February 2011

Martha K. Small ,
Joost J. Vlassak  and
William D. Nix
Martha K. Small
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Joost J. Vlassak
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
William D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
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Abstract

Since its first application to thin films in the 1950's, the bulge test has had a prominent place in the field of thin film mechanical properties. The major appeal of the technique is that it is analogous to the familiar uniaxial tension test, which is commonly applied to bulk materials. At the same time, it avoids the sample tearing and alignment problems associated with micro-tensile tests. Unfortunately, bulge test results have been sometimes controversial and difficult to reproduce. In this paper we address possible causes for mese inconsistencies and describe a method by which the bulge test technique can be made to produce accurate and reliable results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 257
Copyright
Copyright © Materials Research Society 1992

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References

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