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Recursive Image Charge Approach for Quantitative Characterization of Dielectric Thin Film Library Using Scanning Tip Microwave Near-field Microscopy

Published online by Cambridge University Press:  01 February 2011

Chen Gao ,
Bo Hu ,
Mengming Huang ,
Pu Zhang  and
Wen-han Liu
Chen Gao
Affiliation:
National Synchrotron Radiation Laboratory and Department of Physics, University of Science and Technology of China, Hefei, 230026, P. R. China
Bo Hu
Affiliation:
National Synchrotron Radiation Laboratory and Department of Physics, University of Science and Technology of China, Hefei, 230026, P. R. China
Mengming Huang
Affiliation:
National Synchrotron Radiation Laboratory and Department of Physics, University of Science and Technology of China, Hefei, 230026, P. R. China
Pu Zhang
Affiliation:
National Synchrotron Radiation Laboratory and Department of Physics, University of Science and Technology of China, Hefei, 230026, P. R. China
Wen-han Liu
Affiliation:
National Synchrotron Radiation Laboratory and Department of Physics, University of Science and Technology of China, Hefei, 230026, P. R. China
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Abstract

We developed a recursive image charge approach for quantitative characterizations of dielectric thin films using the scanning tip microwave near-field microscope. With this method, frequency shift of the microscope as functions of the dielectric constant and the thickness of a film can be effectively computed in a recursive way. We believe that this approach can promote the high-throughput characterization of the dielectric libraries.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ9.8
Copyright
Copyright © Materials Research Society 2004

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References

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