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Recent Progress in High Power Excimer Laser Development for Producing Next Generation Large-Area Electronic Devices
Published online by Cambridge University Press: 17 March 2011
Abstract
This paper reviews the results of the development of high power (up to 1 kW), high energy (up to 10J) prototypes of excimer lasers that are of interest to meet expanding requirements of the electronic industry. Some experimental characteristics are presented for various excimer prototypes operating at the important wavelength of 308nm (XeCl). Keywords: Excimer laser, average power, output energy, annealing
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- Copyright © Materials Research Society 2001