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Recent Progress in High Power Excimer Laser Development for Producing Next Generation Large-Area Electronic Devices

Published online by Cambridge University Press:  17 March 2011

A. Demin ,
V. Vodchits ,
A. Eltzov ,
O. Kristoforov ,
Yu. Kirukhin ,
A. Vinokhodov ,
V. Borisov ,
R. Osmanov ,
I. Bragin  and
K. Vogler
...Show all authors
A. Demin
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
V. Vodchits
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
A. Eltzov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
O. Kristoforov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
Yu. Kirukhin
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
A. Vinokhodov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
V. Borisov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
R. Osmanov
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
I. Bragin
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
K. Vogler
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
U. Rebhan
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
M. Rahe
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
U. Stamm
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
D. Basting
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
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Abstract

This paper reviews the results of the development of high power (up to 1 kW), high energy (up to 10J) prototypes of excimer lasers that are of interest to meet expanding requirements of the electronic industry. Some experimental characteristics are presented for various excimer prototypes operating at the important wavelength of 308nm (XeCl). Keywords: Excimer laser, average power, output energy, annealing

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 685: Symposium D – Advanced Materials and Devices for Large-Area Electronics , 2001 , D7.2.1
Copyright
Copyright © Materials Research Society 2001

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References

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