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Recent Advances in FIB Technology for Nano-prototyping and Nano-characterisation

Published online by Cambridge University Press:  01 February 2011

Debbie J Stokes
Affiliation:
[email protected], FEI Company, Building AAE, PO BOX 80066, Eindhoven, 5600, Netherlands, +447920711972
Laurent Roussel
Affiliation:
[email protected], FEI Company, Eindhoven, 5600, Netherlands
Oliver Wilhelmi
Affiliation:
[email protected], FEI Company, Eindhoven, 5600, Netherlands
Lucille A Giannuzzi
Affiliation:
[email protected], FEI Company, Hillsboro, OR, 97124, United States
Dominique HW Hubert
Affiliation:
[email protected], FEI Company, Eindhoven, 5600, Netherlands
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Abstract

Combined focused ion beam (FIB) and scanning electron microscopy (SEM) methods are becoming increasingly important for nano-materials applications as we continue to develop ways to exploit the complex interplay between primary ion and electron beams and the substrate, in addition to the various subtle relationships with gaseous intermediaries.

We demonstrate some of the recent progress that has been made concerning FIB SEM processing of both conductive and insulating materials for state-of-the-art nanofabrication and prototyping and superior-quality specimen preparation for ultra-high resolution scanning transmission electron microscopy (STEM) and transmission electron microscopy (TEM) imaging and related in situ nanoanalysis techniques.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

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References

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