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Real-Time Thermo-Mechanical Property Evaluation of Thin Films

Published online by Cambridge University Press:  22 February 2011

John A. Rogers  and
K. A. Nelson
John A. Rogers
Affiliation:
Massachusetts Institute of Technology, Department of Chemistry, Cambridge, MA 02139
K. A. Nelson
Affiliation:
Massachusetts Institute of Technology, Department of Chemistry, Cambridge, MA 02139
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Abstract

We describe an experimental method capable of evaluating the elastic and loss moduli and the thermal diffusivity in thin films. The versatility of the technique is demonstrated with data scans from several films of technological interest.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 324: Symposium K – Diagnostic Techniques for Semiconductor Materials Processing , 1993 , 317
Copyright
Copyright © Materials Research Society 1994

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References

1. Duggal, A.R., Rogers, J.A., and Nelson, K.A., J. Appl. Phys. 72, 2823 (1992); A.R. Duggal, J.A. Rogers, K.A. Nelson, and M.Rothschild, Appl. Phys. Lett. 60, 692 (1992); J.A. Rogers, S.M. Thesis, Massachusetts of Insitute of Technology, (1992).CrossRefGoogle Scholar
2. Rogers, J.A. and Nelson, K.A., accepted in J. Appl. Phys.Google Scholar
3. Eichler, H.J., Gunter, P., and Pohl, D.W., Laser-Induced Dynamic Gratings (Springer, Berlin, 1986).Google Scholar
4. Nelson, K.A. and Fayer, M.D., J. Chem. Phys. 72, 5202 (1980); K.A. Nelson, D.R. Lutz, M.D. Fayer, and L.Madison, Phys. Rev. B 24 3261 (1981).Google Scholar