Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-25T15:42:59.060Z Has data issue: false hasContentIssue false
  • English
  • Français

Realization of 3D Isotropic Negative Index Materials using Massively Parallel and Manufacturable Microfabrication and Micromachining Technology

Published online by Cambridge University Press:  01 February 2011

Logeeswaran VJ ,
M. Saif Islam ,
Mei Lin Chan ,
David A Horsley ,
Wei Wu ,
Shih-Yuan Wang  and
R. Stanley Williams
Logeeswaran VJ
Affiliation:
[email protected], University of California at Davis, Electrical & Computer Engineering, Kemper Hall,, One Shields Ave,, DAVIS, CA, 95616, United States
M. Saif Islam
Affiliation:
[email protected], University of California at Davis, Electrical & Computer Engineering, Kemper Hall,, One Shields Ave,, DAVIS, CA, 95616, United States
Mei Lin Chan
Affiliation:
[email protected], University of California at Davis, Mechanical & Aeronautical Engineering, Bainer Hall,, One Shields Ave,, DAVIS, CA, 95616, United States
David A Horsley
Affiliation:
[email protected], University of California at Davis, Mechanical & Aeronautical Engineering, Bainer Hall,, One Shields Ave,, DAVIS, CA, 95616, United States
Wei Wu
Affiliation:
[email protected], Hewlett Packard Laboratories, Quantum Science Research, 1501 Page Mill Rd, Palo Alto, CA, 94304, United States
Shih-Yuan Wang
Affiliation:
[email protected], Hewlett Packard Laboratories, Quantum Science Research, 1501 Page Mill Rd, Palo Alto, CA, 94304, United States
R. Stanley Williams
Affiliation:
[email protected], Hewlett Packard Laboratories, Quantum Science Research, 1501 Page Mill Rd, Palo Alto, CA, 94304, United States
Get access

Abstract

In this paper, we present a method to realize a three dimensional (3D) homogeneous and isotropic negative index materials (3D-NIMs) fabricated using a low cost and massively parallel manufacturable microfabrication and microassembly technique. The construction of self-assembled 3D-NIM array was realized through two dimensional (2-D) planar microfabrication techniques exploiting the as-deposited residual stress imbalance between a bi-layer consisting of e-beam evaporated metal (650nm of chromium) and a structural layer of 500nm of low stress silicon nitride deposited by LPCVD on a silicon substrate.

A periodic continuation of a single rectangular unit cell consisting of split-ring resonators (SRR) and wires were fabricated to generate a 3D assembly by orienting them along all three Cartesian axes. The thin chromium and silicon nitride bi-layer is formed as hinges. The strain mismatch between the two layers curls the structural layer (flap) containing the SRR upwards. The self-assembled out-of-plane angular position depends on the thickness and material composing the bi-layer. This built-in stress-actuated assembly method is suitable for applications requiring a thin dielectric layer for the SRR. The split-ring resonators and other structures are created on the membrane which is then assembled into the 3-D configuration.

Keywords

microelectro-mechanical (MEMS)self-assemblynanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 919: Symposium J – Negative Index Materials – From Microwave to Optical , 2006 , 0919-J02-01
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Veselago, V. G., “The electrodynamics of substances with simultaneously negative values of ε and μ,” Sov. Phys. Usp. V10, pp 509, 1968.Google Scholar
2. Shelby, R. A., Smith, D. R., and Schultz, S., “Experimental verification of negative index of refraction,” Science V292, pp 77, 2001.Google Scholar
3. Pendry, J. B., Holden, A. J., Robbins, D. J., and Stewart, W. J., “Magnetism from Conductors and Enhanced Nonlinear Phenomena,” IEEE Trans. Microwave Theory Tech. V47, pp 2057, 1999.Google Scholar
4. Pendry, J. B., Holden, A. J., Stewart, W. J., and Youngs, I., “Extremely Low Frequency Plasmons in Metallic Mesostructures,” Physical Review Letter V76, pp4773, (1996).Google Scholar
5. Pendry, J. B., “Negative refraction makes a perfect lens,” Physical Review Letter V85, pp 3966, 2000.Google Scholar
6. Fang, N., Lee, H., Sun, C., Zhang, X., “Sub–Diffraction-Limited Optical Imaging with a Silver Superlens,” Science V308, pp 534, 2005.Google Scholar
7. Alú, A. & Engheta, N., “Pairing an epsilon-negative slab with a mu-negative slab: Resonance, tunneling and transparency,” IEEE Trans. Antennas Propagation, V51, No. 10, pp2558, (2003).Google Scholar
8. Enkrich, C., Wegener, M., Linden, S., Burger, S., Zschiedrich, L., Schmidt, F., Zhou, J., Koschny, Th., and Soukoulis, C.M., “Magnetic metamaterials at telecommunication and visible frequencies,” American Physical Journal (to be published).Google Scholar
9. Ramakrishna, S. A., “Physics of negative refractive index materials,” Rep. Prog. Phys. V68, pp 449, 2005.Google Scholar
10. Engheta, N. & Ziolkowski, R. W., “A Positive Future for Double-Negative Metamaterials,” IEEE Trans. Microwave Theory Tech. V53, No.4, pp 1535, 2005.Google Scholar
11. Koschny, Th., Zhang, L., & Soukoulis, C. M., “Isotropic Three-Dimensional Left-Handed Metamaterials,” Physical Review B 71, 121103–R, (2005).Google Scholar
12. Simovski, CR & Sailing, He, “Frequency range and explicit expressions for negative permittivity and permeability for an isotropic medium formed by a lattice of perfectly conducting omega particles,” Physics Letters A 311 (2-3) pp254–263 (2003).Google Scholar
13. Grbica, A. & Eleftheriades, G. V., “An Isotropic Three-Dimensional Negative-Refractive-Index Transmission-Line Metamaterial,” Journal of Applied Physics V98, pp 043106, 2005 Google Scholar
14. Caloz, C. and Itoh, T., Electromagnetic Metamaterials, Transmission Line Theory and Microwave Applications, Wiley and IEEE Press, 2005.Google Scholar
15. Quack, N., Linderholm, P., Bertsch, A. & Renaud, Ph., “Towards High Frequency 3D Magnetic Resonators Exploring Microfabricated Bimorph Cantilever Structures,” EPFL Latsis NIM Symposium Feb 2005.Google Scholar
16. Nikishkov, G. P., “Curvature estimation for multilayer hinged structures with initial strains,” Journal of Applied Physics, vol. 94, pp. 5333–5336, 2003.Google Scholar
17. Vaccaro, P. O. et al., “Strain-driven self-positioning of micromachined structures,” Applied Physics Letters, vol. 78, pp. 2852–2854, 2001.Google Scholar
18. In, H. J. et al., “The Nanostructured OrigamiTM 3D Fabrication and Assembly Process for Nanomanufacturing,” Proc. 4th IEEE Conf. on Nanotechnology, pp. 358–360, 2004.Google Scholar
19. Moser, H. O., Casse, B. D. F., Wilhelmi, O., & Saw, B. T., “Terahertz Response of a Microfabricated Rod– Split-Ring-Resonator Electromagnetic Metamaterial,” Physical Review Letters V94, 063901 (2005)Google Scholar