Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-29T09:36:04.152Z Has data issue: false hasContentIssue false
  • English
  • Français

Rapid Thermal Annealing of Double Polysilicon Bipolar Transistors

Published online by Cambridge University Press:  25 February 2011

Evan E. Patton ,
Tadanori Yamaguchi ,
June Lee ,
Alex Tang  and
Y.-C. S. Yu
Evan E. Patton
Affiliation:
Tektronix, Inc., P.O. Box 500, Beaverton, Oregon 97077
Tadanori Yamaguchi
Affiliation:
Tektronix, Inc., P.O. Box 500, Beaverton, Oregon 97077
June Lee
Affiliation:
Tektronix, Inc., P.O. Box 500, Beaverton, Oregon 97077
Alex Tang
Affiliation:
Tektronix, Inc., P.O. Box 500, Beaverton, Oregon 97077
Y.-C. S. Yu
Affiliation:
Aspen Semiconductor, Inc., 58 Daggett Drive, San Jose, CA 95134
Get access

Abstract

This paper reports on very shallow double rapid thermally diffused npn transistor junctions, emitter polysilicon sheet resistance, and titanium disilicide formation. A transistor with a 675Å base width fabricated using rapid thermal annealing is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 146: Symposium B – Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing , 1989 , 179
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yamaguchi, T., Yu, Y.-C. S., Lane, E. E., Lee, J. S., Patton, E. E., Herman, R. D., Ahrendt, D. R., Drobny, V. F., Yuzuriha, T. H., Garuts, V. E., IEEE Trans. Electron. Devices 35 (8), 1247–1256 (1988).Google Scholar
2. Hoyt, J. L., PhD thesis, Stanford University, 1987.Google Scholar
3. Box, G. E. P., Hunter, W. G., Hunter, J. S., Statistics for Experimenters. (John Wiley & Sons, Inc., New York, 1978), pp. 510–35.Google Scholar
4. Diamond, W. J., Practical Experiment Designs, (Lifetime Learning Publications, Belmont, CA, 1981) pp. 87–125.Google Scholar
5. Pettibone, D. W., Suarez, J. R., and Gat, A., Mat. Res. Soc. Symp. Proc. Vol. 52 (1986) pp. 209–216.Google Scholar