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Raman Spectroscopy of Barium Titanate Thin Films

Published online by Cambridge University Press:  15 February 2011

Lawrence H. Robins ,
Debra L. Kaiser ,
Lawrence D. Rotter  and
Gregory T. Stauf
Lawrence H. Robins
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Debra L. Kaiser
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Lawrence D. Rotter
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Gregory T. Stauf
Affiliation:
Advanced Technology Materials, Inc., Danbury, CT
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Abstract

Raman spectroscopy was used to examine the structure of polycrystalline and epitaxial barium titanium oxide thin films grown by metal-organic chemical vapor deposition. The Raman spectra confirmed the presence of the tetragonal ferroelectric phase of BaTiO3 and also revealed several other Ba-Ti-O phases. These films were also characterized by X-ray diffraction and TEM imaging. The structural information provided by the Raman spectra was qualitatively consistent with the X-ray and TEM results. The temperature dependencies of the Raman spectra of two films were examined in the range 25°C-175°C. Raman peaks due to tetragonal BaTiO3 were observed at temperatures well above 132°C, which is the tetragonal-cubic phase transition temperature for bulk single-crystal BaTiO3. This may indicate stabilization of the tetragonal phase by an anisotropic film-substrate interaction or by inter-grain stresses.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 341: Symposium F – Epitaxial Oxide Thin Films and Heterostructures , 1994 , 315
Copyright
Copyright © Materials Research Society 1994

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