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Raman Spectroscopy of Amorphous Carbon

Published online by Cambridge University Press:  10 February 2011

D. R. Tallant ,
T. A. Friedmann ,
N. A. Missert ,
M. P. Siegal  and
J. P. Sullivan
D. R. Tallant
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185–1411, [email protected]
T. A. Friedmann
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185–1411, [email protected]
N. A. Missert
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185–1411, [email protected]
M. P. Siegal
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185–1411, [email protected]
J. P. Sullivan
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185–1411, [email protected]
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Abstract

Amorphous carbon is an elemental form of carbon with low hydrogen content, which may be deposited in thin films by the impact of high energy carbon atoms or ions. It is structurally distinct from the more well-known elemental forms of carbon, diamond and graphite. It is distinct in physical and chemical properties from the material known as diamond-like carbon, a form which is also amorphous but which has a higher hydrogen content, typically near 40 atomic percent. Amorphous carbon also has distinctive Raman spectra, whose patterns depend, through resonance enhancement effects, not only on deposition conditions but also on the wavelength selected for Raman excitation. This paper provides an overview of the Raman spectroscopy of amorphous carbon and describes how Raman spectral patterns correlate to film deposition conditions, physical properties and molecular level structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 498: Symposium AA – Covalently Bonded Disordered Thin-Film Materials , 1997 , 37
Copyright
Copyright © Materials Research Society 1998

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References

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